Study of optical and photocatalytic properties of titanium oxide films with different oxidation degree

The results of studies the optical and photocatalytic properties titanium oxide films deposited by vacuum-arc evaporation in an oxygen-containing atmosphere are presented. It was experimentally shown that different degrees oxidation formed during deposition, depending on amount oxygen flow entering working chamber. obtained showed a transitional mode between deposition metallic Ti dielectric TiO 2 have maximum activity. This is observed at into chamber from 9 to 12 cm 3 /min Keywords: dioxide, anatase,